The influence of vacancy generation at the initial stage of ion implantation; AIP Conference Proceedings; Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014

The influence of vacancy generation at the initial stage of ion implantation; AIP Conference Proceedings; Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014

מידע ביבליוגרפי
Parent link:	AIP Conference Proceedings Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014.— 2014.— [P. 479-482]
מחבר ראשי:	Parfenova E. S. Elena Sergeevna
מחבר תאגידי:	Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
מחברים אחרים:	Knyazeva A. G. Anna Georgievna
סיכום:	Title screen The paper presents a coupled isothermal model at the initial stage of a solid surface treatment with particle beams. Mechanical stresses arising due to the interaction of particles with the surface affect the redistribution of the implanted impurity. Vacancies in the metal surface and their generation under stress are also taken into account. The kinetic law is formulated on the basis of thermodynamics of irreversible processes. The authors used numerical investigation methods. As a result, they have obtained the distributions of impurity concentration and deformations for various time moments. The authors also compare the concentration and deformation profiles with and without vacancies and study the influences of some model parameters. The effect of vacancy generation on the diffusion has been established to lead to an increase in the depth of penetration, as well as in the concentration of impurities. Режим доступа: по договору с организацией-держателем ресурса
שפה:	אנגלית
יצא לאור:	2014
נושאים:	электронный ресурс труды учёных ТПУ генерация вакансии ионная имплантация поверхности численные методы деформации диффузия
גישה מקוונת:	http://dx.doi.org/10.1063/1.4901496 http://earchive.tpu.ru/handle/11683/35743
פורמט:	אלקטרוני Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641898

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