Parfenova E. S. Elena Sergeevna & Knyazeva A. G. Anna Georgievna. (2014). The influence of vacancy generation at the initial stage of ion implantation; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014. https://doi.org/10.1063/1.4901496
Cita Chicago Style (17a ed.)Parfenova E. S. Elena Sergeevna y Knyazeva A. G. Anna Georgievna. The Influence of Vacancy Generation at the Initial Stage of Ion Implantation; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014, 2014. https://doi.org/10.1063/1.4901496.
Cita MLA (9a ed.)Parfenova E. S. Elena Sergeevna y Knyazeva A. G. Anna Georgievna. The Influence of Vacancy Generation at the Initial Stage of Ion Implantation; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014, 2014. https://doi.org/10.1063/1.4901496.