Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O/Si-Al-N

Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O/Si-Al-N

Bibliographic Details
Parent link:AIP Conference Proceedings
Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014.— 2014.— [P. 147-150]
Corporate Author: Национальный исследовательский Томский политехнический университет
Other Authors: Fedorischeva M. V. Marina, Sergeev V. P. Viktor Petrovich, Kalashnikov M. P. Mark Petrovich, Voronov A. V. Andrei
Summary:Title screen
X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basicallynanocrystalline ZrO[2] and the layers on the basis of Si-Al-N contain Si[3]N[4] amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that thecrystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2014
Subjects:
электронный ресурс
труды учёных ТПУ
внутреннее напряжение
многослойные покрытия
фазовый состав
слои
рентгеновские исследования
ПЭМ
просвечивающая электронная микроскопия
Online Access:http://dx.doi.org/10.1063/1.4898904
http://earchive.tpu.ru/handle/11683/35688
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641640

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