Национальный исследовательский Томский политехнический университет, Fedorischeva M. V. Marina, Sergeev V. P. Viktor Petrovich, Kalashnikov M. P. Mark Petrovich, & Voronov A. V. Andrei. (2014). Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O/Si-Al-N; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014. https://doi.org/10.1063/1.4898904
Chicagoスタイル(17版)引用形式Национальный исследовательский Томский политехнический университет, Fedorischeva M. V. Marina, Sergeev V. P. Viktor Petrovich, Kalashnikov M. P. Mark Petrovich, , Voronov A. V. Andrei. Internal Stresses and Structure of Multilayer Coatings on the Basis of Zr-Y-O/Si-Al-N; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014, 2014. https://doi.org/10.1063/1.4898904.
MLA(9版)引用形式Национальный исследовательский Томский политехнический университет, et al. Internal Stresses and Structure of Multilayer Coatings on the Basis of Zr-Y-O/Si-Al-N; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014, 2014. https://doi.org/10.1063/1.4898904.