Томский политехнический университет, Fedorischeva M. V. Marina, Sergeev V. P. Viktor Petrovich, Kalashnikov M. P. Mark Petrovich, & Voronov A. V. Andrei. (2014). Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O/Si-Al-N; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014. https://doi.org/10.1063/1.4898904
Chicago Style (17. basım) AtıfТомский политехнический университет, Fedorischeva M. V. Marina, Sergeev V. P. Viktor Petrovich, Kalashnikov M. P. Mark Petrovich, ve Voronov A. V. Andrei. Internal Stresses and Structure of Multilayer Coatings on the Basis of Zr-Y-O/Si-Al-N; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014, 2014. https://doi.org/10.1063/1.4898904.
MLA (9th ed.) AtıfТомский политехнический университет, et al. Internal Stresses and Structure of Multilayer Coatings on the Basis of Zr-Y-O/Si-Al-N; AIP Conference Proceedings; Vol. 1623: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014. 2014, 2014. https://doi.org/10.1063/1.4898904.