Ermakova E. N. Evgeniya Nikolaevna, Rumyantsev Y. M. Yurii Mihailovich, Shugurov A. R. Artur Rubinovich, Panin A. V. Alexey Viktorovich, & Kosinova M. L. Marina Leonidovna. (2015). PECVD synthesis, optical and mechanical properties of silicon carbon nitride films; Applied Surface Science; Vol. 339. 2015. https://doi.org/10.1016/j.apsusc.2015.02.155
Παραπομπή σε μορφή Chicago (17η εκδ.)Ermakova E. N. Evgeniya Nikolaevna, Rumyantsev Y. M. Yurii Mihailovich, Shugurov A. R. Artur Rubinovich, Panin A. V. Alexey Viktorovich, και Kosinova M. L. Marina Leonidovna. PECVD Synthesis, Optical and Mechanical Properties of Silicon Carbon Nitride Films; Applied Surface Science; Vol. 339. 2015, 2015. https://doi.org/10.1016/j.apsusc.2015.02.155.
Παραπομπή σε μορφή MLA (9th εκδ.)Ermakova E. N. Evgeniya Nikolaevna, et al. PECVD Synthesis, Optical and Mechanical Properties of Silicon Carbon Nitride Films; Applied Surface Science; Vol. 339. 2015, 2015. https://doi.org/10.1016/j.apsusc.2015.02.155.