Ermakova E. N. Evgeniya Nikolaevna, Rumyantsev Y. M. Yurii Mihailovich, Shugurov A. R. Artur Rubinovich, Panin A. V. Alexey Viktorovich, & Kosinova M. L. Marina Leonidovna. (2015). PECVD synthesis, optical and mechanical properties of silicon carbon nitride films. 2015. https://doi.org/10.1016/j.apsusc.2015.02.155
Citace podle Chicago (17th ed.)Ermakova E. N. Evgeniya Nikolaevna, Rumyantsev Y. M. Yurii Mihailovich, Shugurov A. R. Artur Rubinovich, Panin A. V. Alexey Viktorovich, a Kosinova M. L. Marina Leonidovna. PECVD Synthesis, Optical and Mechanical Properties of Silicon Carbon Nitride Films. 2015, 2015. https://doi.org/10.1016/j.apsusc.2015.02.155.
Citace podle MLA (9th ed.)Ermakova E. N. Evgeniya Nikolaevna, et al. PECVD Synthesis, Optical and Mechanical Properties of Silicon Carbon Nitride Films. 2015, 2015. https://doi.org/10.1016/j.apsusc.2015.02.155.