Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies; Advanced Materials Research : Advanced materials, synthesis, development and application; Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013)

Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies; Advanced Materials Research : Advanced materials, synthesis, development and application; Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013)

Bibliographic Details
Parent link:Advanced Materials Research : Advanced materials, synthesis, development and application: Scientific Journal
Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013).— 2014.— [P. 288-291]
Main Author: Stepanov I. B. Igor Borisovich
Corporate Authors: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Лаборатория № 22, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Центр измерений свойств материалов (ЦИСМ)
Other Authors: Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich
Summary:Title screen
The paper describes high broad metal ion source based on dc macroparticle filtered vacuum arc plasma generation with the dc ion-beam extraction. The possibility of formation of pseudo ribbon beam of metal ions with the parameters: ion beam length 0.6 m, ion current up to 0.2 A, accelerating voltage 40 kV, and ion energy up to 160 kV has been demonstrated. The pseudo ribbon ion beam is formed from dc driven vacuum arc plasma. The results of investigation of the vacuum arc evaporator ion-emission properties are presented. The influence of magnetic field strength near the cathode surface on the arc spot movement and ion-emission properties of vacuum-arc discharge for different cathode materials are determined. It was shown that vacuum-arc discharge stability can be reached when the magnetic field strength ranges from 40 to 70 Gs on the cathode surface.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2014
Series:Chemistry and Physics of Materials Surface
Subjects:
электронный ресурс
труды учёных ТПУ
катоды
ионные пучки
покрытия
Online Access:http://dx.doi.org/10.4028/www.scientific.net/AMR.880.288
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=640728

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