Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies

Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies

Bibliografiske detaljer
Parent link:	Advanced Materials Research : Advanced materials, synthesis, development and application: Scientific Journal Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013).— 2014.— [P. 288-291]
Hovedforfatter:	Stepanov I. B. Igor Borisovich
Corporate Authors:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Лаборатория № 22, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Центр измерений свойств материалов (ЦИСМ)
Andre forfattere:	Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich
Summary:	Title screen The paper describes high broad metal ion source based on dc macroparticle filtered vacuum arc plasma generation with the dc ion-beam extraction. The possibility of formation of pseudo ribbon beam of metal ions with the parameters: ion beam length 0.6 m, ion current up to 0.2 A, accelerating voltage 40 kV, and ion energy up to 160 kV has been demonstrated. The pseudo ribbon ion beam is formed from dc driven vacuum arc plasma. The results of investigation of the vacuum arc evaporator ion-emission properties are presented. The influence of magnetic field strength near the cathode surface on the arc spot movement and ion-emission properties of vacuum-arc discharge for different cathode materials are determined. It was shown that vacuum-arc discharge stability can be reached when the magnetic field strength ranges from 40 to 70 Gs on the cathode surface. Режим доступа: по договору с организацией-держателем ресурса
Udgivet:	2014
Serier:	Chemistry and Physics of Materials Surface
Fag:	электронный ресурс труды учёных ТПУ катоды ионные пучки покрытия
Online adgang:	http://dx.doi.org/10.4028/www.scientific.net/AMR.880.288
Format:	Electronisk Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=640728

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