Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies; Advanced Materials Research : Advanced materials, synthesis, development and application; Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013)

Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies; Advanced Materials Research : Advanced materials, synthesis, development and application; Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013)

Podrobná bibliografie
Parent link:Advanced Materials Research : Advanced materials, synthesis, development and application: Scientific Journal
Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013).— 2014.— [P. 288-291]
Hlavní autor: Stepanov I. B. Igor Borisovich
Korporace: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Лаборатория № 22, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Центр измерений свойств материалов (ЦИСМ)
Další autoři: Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich
Shrnutí:Title screen
The paper describes high broad metal ion source based on dc macroparticle filtered vacuum arc plasma generation with the dc ion-beam extraction. The possibility of formation of pseudo ribbon beam of metal ions with the parameters: ion beam length 0.6 m, ion current up to 0.2 A, accelerating voltage 40 kV, and ion energy up to 160 kV has been demonstrated. The pseudo ribbon ion beam is formed from dc driven vacuum arc plasma. The results of investigation of the vacuum arc evaporator ion-emission properties are presented. The influence of magnetic field strength near the cathode surface on the arc spot movement and ion-emission properties of vacuum-arc discharge for different cathode materials are determined. It was shown that vacuum-arc discharge stability can be reached when the magnetic field strength ranges from 40 to 70 Gs on the cathode surface.
Режим доступа: по договору с организацией-держателем ресурса
Jazyk:angličtina
Vydáno: 2014
Edice:Chemistry and Physics of Materials Surface
Témata:
электронный ресурс
труды учёных ТПУ
катоды
ионные пучки
покрытия
On-line přístup:http://dx.doi.org/10.4028/www.scientific.net/AMR.880.288
Médium: Elektronický zdroj Kapitola
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=640728

Podobné jednotky

Podobné jednotky