Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation
| Parent link: | Advanced Materials Research : Advanced materials, synthesis, development and application: Scientific Journal Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013).— 2014.— [P. 155-160] |
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| Corporate Authors: | , , , |
| Other Authors: | , , , , |
| Summary: | Title screen This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2014
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| Series: | Diagnostics and Engineering of Novel Materials |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.4028/www.scientific.net/AMR.880.155 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=640695 |
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| 200 | 1 | |a Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation |f A. I. Ryabchikov [et al.] | |
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| 225 | 1 | |a Diagnostics and Engineering of Novel Materials | |
| 300 | |a Title screen | ||
| 330 | |a This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\4598 |t Advanced Materials Research : Advanced materials, synthesis, development and application |o Scientific Journal | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\4601 |t Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013) |o The Xth International Conference, April 23-26, 2013, Tomsk, Russia |o [proceedings] |v [P. 155-160] |d 2014 | |
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