Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation

Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation

Bibliographic Details
Parent link:Advanced Materials Research : Advanced materials, synthesis, development and application: Scientific Journal
Vol. 880 : Prospects of Fundamental Sciences Development (PFSD-2013).— 2014.— [P. 155-160]
Corporate Authors: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Лаборатория № 22, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Центр измерений свойств материалов (ЦИСМ), Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра теоретической и экспериментальной физики (ТиЭФ), Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра иностранных языков физико-технического института (ИЯФТ)
Other Authors: Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich, Bumagina A. I. Anna Ivanovna, Bolbasov E. N. Evgeny Nikolaevich, Daneykina (Daneikina) N. V. Natalia Viktorovna
Summary:Title screen
This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2014
Series:Diagnostics and Engineering of Novel Materials
Subjects:
электронный ресурс
труды учёных ТПУ
микрочастицы
плазма
короткие импульсы
ионная имплантация
Online Access:http://dx.doi.org/10.4028/www.scientific.net/AMR.880.155
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=640695
Description
Summary:Title screen
This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.4028/www.scientific.net/AMR.880.155

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