Influence of the High-Intensity Short-Pulse Implantation of Ions on the Properties of Polycrystalline Silicon; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 8, iss. 6

Influence of the High-Intensity Short-Pulse Implantation of Ions on the Properties of Polycrystalline Silicon; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 8, iss. 6

Manylion Llyfryddiaeth
Parent link:	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques.— , 1982- Vol. 8, iss. 6.— 2014.— [P. 1168-1173]
Awduron Corfforaethol:	Национальный исследовательский Томский политехнический университет (ТПУ) Энергетический институт (ЭНИН) Кафедра электроснабжения промышленных предприятий (ЭПП), Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра водородной энергетики и плазменных технологий (ВЭПТ)
Awduron Eraill:	Kabyshev A. V. Alexander Vasilievich, Konusov F. V. Fedor Valerievich, Remnev G. E. Gennady Efimovich, Pavlov S. K. Sergey Konstantinovich
Crynodeb:	Title screen The electrical and photoelectric properties of polycrystalline Si are studied after the high-intensity short-pulse implantation of C ions. It is established that annealing in vacuum (10–2 Pa, 300–1200 K) affects the characteristics of the surface dark conductivity and photoconductivity of Si. The optimal conditions for the thermal vacuum treatment of samples in the case when properties most stable to thermal effects and field excitement are reached are determined. The probable reasons for the change in the electrical and photoelectric characteristics of Si are established. Режим доступа: по договору с организацией-держателем ресурса
Iaith:	Saesneg
Cyhoeddwyd:	2014
Pynciau:	электронный ресурс труды учёных ТПУ
Mynediad Ar-lein:	http://link.springer.com/article/10.1134/S1027451014060068
Fformat:	Electronig Pennod Llyfr
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=638352

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