Thermal and chemical passivation of gallium-arsenide films deposited from ablation plasma; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 8, iss. 1

Détails bibliographiques
Parent link:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques: Scientific Journal
Vol. 8, iss. 1.— 2014.— [P. 158-163]
Auteur principal: Kabyshev A. V. Alexander Vasilievich
Collectivités auteurs: Национальный исследовательский Томский политехнический университет (ТПУ) Энергетический институт (ЭНИН) Кафедра электроснабжения промышленных предприятий (ЭПП), Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра водородной энергетики и плазменных технологий (ВЭПТ)
Autres auteurs: Konusov F. V. Fedor Valerievich, Remnev G. E. Gennady Efimovich
Résumé:Title screen
The electric and photoelectric properties of gallium-arsenide films deposited on a polycrystalline corundum substrate from the ablation plasma formed by a high-power ion beam are investigated. It is ascertained that vacuum and air annealing (in the former case, P = 10?2 Pa and T = 300–1200 K) and sulfide chemical passivation in an alcoholic solution affect the characteristics of the dark conductivity and photo-conductivity of the film surfaces. The optimal conditions for thermal and chemical treatment, at which the most stable changes in film the properties are attained, are determined. Enhancement in the stability of the electrical and photoelectric characteristics of films, which is achieved after thermal treatment, arises from the annealing of defects and their clusterization. Sulfide passivation leads to changes in the characteristics and increases the stability of properties under air oxidation.
Режим доступа: по договору с организацией-держателем ресурса
Langue:anglais
Publié: 2014
Sujets:
Accès en ligne:http://link.springer.com/article/10.1134%2FS1027451014010285
Format: Électronique Chapitre de livre
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=637371

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