Piestrup M. A. Melvin A., Powell M. W. Michael W., Cremer J. T. J. Theodore, Lombardo L. W. Louis W., Kaplin V. V. Valeriy Viktorovich, Uglov S. R. Sergey Romanovich, . . . Mikhalchuk A. A. Aleksandr Alexandrovich. (1998). Compact recycled beam source for XRL and EUVL exposure tools. 1998.
Chicago Style (17th ed.) CitationPiestrup M. A. Melvin A., et al. Compact Recycled Beam Source for XRL and EUVL Exposure Tools. 1998, 1998.
MLA (9th ed.) CitationPiestrup M. A. Melvin A., et al. Compact Recycled Beam Source for XRL and EUVL Exposure Tools. 1998, 1998.
Warning: These citations may not always be 100% accurate.