Технология формирования мишени для ВЧ магнетронного распыления из биметаллических частиц CU-W; Инновационные технологии в машиностроении

Технология формирования мишени для ВЧ магнетронного распыления из биметаллических частиц CU-W

Bibliografiske detaljer
Parent link:	Инновационные технологии в машиностроении.— 2022.— [С. 29-31]
Hovedforfatter:	Просолов К. А.
Institution som forfatter:	Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
Andre forfattere:	Сулиз К. В., Шаркеев Ю. П. Юрий Петрович
Summary:	Заглавие с титульного экрана Формирование износостойких покрытий методами вакуумного напыления остается актуальной задачей в области материаловедения. Покрытия на основе тугоплавких соединений переходных металлов представляются перспективными для применения в качестве не только износостойких, но и коррозионностойких, а также антибактериальных материалов. В работе отражены технологические подходы к формированию мишени для ВЧ магнетронного распыления путем консолидации порошков металлов на основе системы Cu-W, полученных совместным электрическим взрывом двух проволочек. The formation of wear-resistant coatings by vacuum spraying methods remains an urgent task in the field of materials science. Coatings based on refractory compounds of transition metals are promising for use as not only wear-resistant, but also corrosion-resistant, as well as antibacterial materials. The paper reflects technological approaches to the formation of a target for RF magnetron sputtering by consolidating metal powders based on the Cu-W system obtained by a joint electric explosion of two wires.
Sprog:	russisk
Udgivet:	2022
Serier:	Технологии получения и обработки материалов в машиностроении
Fag:	труды учёных ТПУ электронный ресурс биметаллические материалы несмешивающиеся металлы износостойкие покрытия ВЧ-магнетронное распыление bimetallic particles immiscible metals wear-resistant coatings RF magnetron sputtering
Online adgang:	http://earchive.tpu.ru/handle/11683/72746
Format:	Electronisk Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=634634

Lignende værker

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Udgivet: (2014)

Erratum to: Wettability of Thin Silicate-Containing Hydroxyapatite Films formed by RF-Magnetron Sputtering; Russian Physics Journal; Vol. 56, iss. 11
Udgivet: (2014)

Physical-Mechanical Characteristics of RF Magnetron Sputter-Deposited Coatings Based on Silver-Doped Hydroxyapatite; Russian Physics Journal; Vol. 56, iss. 10
Udgivet: (2014)

Tailoring the Surface Morphology and the Crystallinity State of Cu- and Zn-Substituted Hydroxyapatites on Ti and Mg-Based Alloys; Materials; Vol. 13, iss. 19
Udgivet: (2020)

Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65
Udgivet: (2023)

Thin calcium-phosphate coatings produced by RF Magnetron sputtering and prospects for their use in biomedical engineering; Biomedical Engineering; Vol. 42, iss. 3
Udgivet: (2008)

Phase and elemental composition of silicon-containing hydroxyapatite-based coatings fabricated by RF-magnetron sputtering for medical implants; Inorganic Materials: Applied Research; Vol. 4, iss. 3
Udgivet: (2013)

The preparation of calcium phosphate coatings on titanium and nickel-titanium by rf-magnetron-sputtered deposition: Composition, structure and micromechanical properties; Surface and Coatings Technology; Vol. 202, iss. 16
Udgivet: (2008)

Structure, mechanical and tribological properties of Ti-doped and Cr-doped a-C:H:SiOx coatings; Vacuum; Vol. 219, Pt. A
Udgivet: (2024)

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Udgivet: (2012)

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Udgivet: (2022)

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Udgivet: (2010)

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Udgivet: (2021)

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Udgivet: (2007)

Multiscale design of an additively manufactured Ti–Nb alloy with nanostructured Sr-substituted hydroxyapatite coating for bone tissue engineering; Ceramics International; Vol. 51, iss. 25, pt. C
Udgivet: (2025)

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Udgivet: (2018)

Magnetron deposition of copper oxide coatings in a metallic mode enhanced by RF-ICP source: A role of substrate biasing; Vacuum; Vol. 211
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Udgivet: (2023)

Influence of Nitrogen on Corrosion Resistance of Thin Ti–O–N Films Deposited by Reactive Magnetron Sputtering; Inorganic Materials: Applied Research; Vol. 12, iss. 4
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Udgivet: (2021)

Microstructure characterization and corrosion behaviour of a nanohydroxyapatite coating deposited on AZ31 magnesium; Vacuum; Vol. 117
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Udgivet: (2015)

Characteristics of the Child-Droplets Emerged by Micro-Explosion of the Heterogeneous Droplets Exposed to Conductive, Convective and Radiative Heating; Microgravity Science and Technology; Vol. 31, iss. 5
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Udgivet: (2019)

Influence of the substrate bias on the stoichiometry and structure of RF-magnetron sputter-deposited silver-containing calcium phosphate coatings; Materialwissenschaft und Werkstofftechnik; Vol. 44, iss. 2-3
Udgivet: (2013)

Bone marrow derived mesenchymal stem cell response to the RF magnetron sputter deposited hydroxyapatite coating on AZ91 magnesium alloy; Materials Chemistry and Physics; Vol. 221
Udgivet: (2018)

The study of deep holes accuracy and surface roughness after gun drilling; Mechanical Engineering, Automation and Control Systems (MEACS)
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Udgivet: (2014)

Catalytic behavior of bimetallic Ni-Fe systems in the decomposition of 1,2-dichloroethane. Effect of iron doping and preparation route; Reaction Kinetics, Mechanisms and Catalysis; Vol. 121, iss. 2
Udgivet: (2017)

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Udgivet: (2014)

High-rate magnetron deposition of CuOx films in the metallic mode enhanced by radiofrequency inductively coupled plasma source; Vacuum; Vol. 207
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Udgivet: (2023)

Glancing Angle Deposition of Zn-Doped Calcium Phosphate Coatings by RF Magnetron Sputtering; Coatings; Vol. 9, iss. 4
Udgivet: (2019)

Fabrication, investigations of structure and in vitro studies of hydroxyapatite-coated electron beam melted titanium substrate; Energy Fluxes and Radiation Effects (EFRE-2016)
Udgivet: (2016)

Hybrid biocomposite with a tunable antibacterial activity and bioactivity based on RF magnetron sputter deposited coating and silver nanoparticles; Applied Surface Science; Vol. 329
Udgivet: (2015)

Ab initio calculations and a scratch test study of RF-magnetron sputter deposited hydroxyapatite and silicon-containing hydroxyapatite coatings; Surfaces and Interfaces; Vol. 21
Udgivet: (2020)

Correlation between structural and mechanical properties of RF magnetron sputter deposited hydroxyapatite coating; Materials Characterization; Vol. 142
Udgivet: (2018)

Effect of the Metal Deposition Order on Structural, Electronic and Catalytic Properties of TiO2-Supported Bimetallic Au-Ag Catalysts in 1-Octanol Selective Oxidation; Catalysts; Vol. 11, iss. 7
Udgivet: (2021)

Non-destructive techniques on zirconium alloy E110 with chromium coatings for the production of emergency-resistant core components of nuclear reactors; Перспективные материалы конструкционного и функционального назначения
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Udgivet: (2024)

Composite Biphase Coatings Formed by Hybrid Technology for Biomedical Applications; Energy Fluxes and Radiation Effects (EFRE-2020 online)
Udgivet: (2020)

RF magnetron-sputtered coatings deposited from biphasic calcium phosphate targets for biomedical implant applications; Bioactive Materials; Vol. 2, iss. 3
Udgivet: (2017)

Physical principles of radio-frequency magnetron sputter deposition of calcium-phosphate-based coating with tailored properties; Surface and Coatings Technology; Vol. 413
Udgivet: (2021)

Breakup and explosion of droplets of two immiscible fluids and emulsions; International Journal of Thermal Sciences; Vol. 142
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Udgivet: (2019)

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Udgivet: (2019)

Low resistivity measurement of chromium coatings on zirconium alloys E110 for the production of accident-resistant core components of nuclear reactors; Russian Physics Journal; Vol. 68, iss. 3
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Udgivet: (2025)

Development and Study of the Properties of Impact-Resistant Ceramic Nanocomposite Coatings for Silicon; Glass and Ceramics; Vol. 77, iss. 3-4
Udgivet: (2020)