Анализ возможностей магнетронных распылительных систем для высокоскоростного осаждения функциональных покрытий; Современные технологии, экономика и образование
| Parent link: | Современные технологии, экономика и образование.— 2020.— [С. 51-52] |
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| Diğer Yazarlar: | , |
| Özet: | Заглавие с титульного экрана The mechanisms leading to a noticeable increase in the rate of the surface erosion of liquid metal targets sputtered in the plasma of magnetron sputtering systems are studied. Experimental studies of the growth rate of metal coatings during the operation of magnetrons with liquid-phase targets have been carried out. The calculated results and experimental data are in good agreement, which indicates the correctness of the formulated physical concepts and the obtained regularities. |
| Dil: | Rusça |
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2020
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| Online Erişim: | http://earchive.tpu.ru/handle/11683/64631 |
| Materyal Türü: | Elektronik Kitap Bölümü |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=632599 |