Оптические свойства пленок азотосодержащего оксида титана, осажденных магнетронным распылением; Перспективы развития фундаментальных наук; Т. 1 : Физика
| Parent link: | Перспективы развития фундаментальных наук=Prospects of Fundamental Sciences Development: сборник научных трудов XVI Международной конференции студентов, аспирантов и молодых ученых, г. Томск, 23-26 апреля 2019 г./ Национальный исследовательский Томский политехнический университет (ТПУ) ; под ред. И. А. Курзиной, Г. А. Вороновой.— , 2019 Т. 1 : Физика.— 2019.— [С. 388-390] |
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| Övriga upphovsmän: | , |
| Sammanfattning: | Заглавие с экрана In this paper we present the results of investigation of optical properties of nitrogen doped titanium oxide thin films, deposited using magnetron sputtering. The influence of reactive atmosphere and post annealing on refractive index, transmittance and band gap energy has been analyzed. Regime with N[2]/O[2] ratio of 1-1 was characterized by maximum of deposition rate and minimum of refractive index. N-induced band gap narrowing has been observed and the minimum band gap energy was found to be 2.87 eV for annealed TiON 1.5-1 film. |
| Språk: | ryska |
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2019
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| Länkar: | http://earchive.tpu.ru/handle/11683/55873 |
| Materialtyp: | Elektronisk Bokavsnitt |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=629726 |
| Sammanfattning: | Заглавие с экрана In this paper we present the results of investigation of optical properties of nitrogen doped titanium oxide thin films, deposited using magnetron sputtering. The influence of reactive atmosphere and post annealing on refractive index, transmittance and band gap energy has been analyzed. Regime with N[2]/O[2] ratio of 1-1 was characterized by maximum of deposition rate and minimum of refractive index. N-induced band gap narrowing has been observed and the minimum band gap energy was found to be 2.87 eV for annealed TiON 1.5-1 film. |
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