A comparative study on the properties of chromium coatings deposited by agnetron sputtering with hot and cooled cathode; Energy Fluxes and Radiation Effects (EFRE-2016)

A comparative study on the properties of chromium coatings deposited by agnetron sputtering with hot and cooled cathode; Energy Fluxes and Radiation Effects (EFRE-2016)

Bibliographic Details
Parent link:	Energy Fluxes and Radiation Effects (EFRE-2016).— 2016.— [P. 338]
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра экспериментальной физики (ЭФ)
Other Authors:	Bestetti M. Massimiliano, Vicenzo A. Antonello, Franz S. Silvia, Francesca Brunella M. Maria, Sidelev D. V. Dmitry Vladimirovich, Bleykher (Bleicher) G. A. Galina Alekseevna, Krivobokov V. P. Valery Pavlovich
Summary:	Title screen
Language:	English
Published:	2016
Subjects:	труды учёных ТПУ электронный ресурс сравнительные исследования хромовые покрытия магнетронное распыление холодные катоды выпаривание осаждение magnetron sputtering hot target evaporation chromium high deposition rate
Online Access:	http://earchive.tpu.ru/handle/11683/35862
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=621404

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