The phase and elemental co mposition of fil tered arc evaporated TiAlN coatings using separate cathodes; Energy Fluxes and Radiation Effects (EFRE-2016)

The phase and elemental co mposition of fil tered arc evaporated TiAlN coatings using separate cathodes; Energy Fluxes and Radiation Effects (EFRE-2016)

Bibliographic Details
Parent link:	Energy Fluxes and Radiation Effects (EFRE-2016).— 2016.— [P. 332]
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра общей физики (ОФ)
Other Authors:	Sutygina A. N. Alina Nikolaevna, Kashkarov E. B. Egor Borisovich, Shulepov I. A. Ivan Anisimovich, Nikitenkov N. N. Nikolai Nikolaevich, Pryamushko T. S. Tatiana Sergeevna
Summary:	Title screen
Language:	English
Published:	2016
Subjects:	труды учёных ТПУ электронный ресурс элементный состав покрытия катоды дуги вакуумно-дуговое осаждение фазовый состав elemental distribution vacuum arc deposition phase composition
Online Access:	http://earchive.tpu.ru/handle/11683/35861
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=621403

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