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20260723130551.0 |
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|a (RuTPU)RU\TPU\conf\19927
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|a RU\TPU\conf\19884
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|a 621360
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|a 20161215d2016 k||y0rusy50 ba
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|a eng
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|a RU
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|a drgn ---uucaa
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| 181 |
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|a i
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|a b
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|a Modification of optical and electrical pr operties Sn0[2] under the influence of argon ion beam
|f S. P. Umnov, O. Kh. Asainov, V. Temenkov
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| 203 |
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|a Текст
|c электронный
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| 300 |
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|a Title screen
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|0 (RuTPU)RU\TPU\conf\19513
|t Energy Fluxes and Radiation Effects (EFRE-2016)
|o International Congress, October 2–7, 2016, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]
|v [P. 265]
|d 2016
|
| 610 |
1 |
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|a труды учёных ТПУ
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| 610 |
1 |
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|a электронный ресурс
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| 610 |
1 |
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|a модификации
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| 610 |
1 |
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|a оптические свойства
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| 610 |
1 |
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|a электрические свойства
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| 610 |
1 |
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|a пучки
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| 610 |
1 |
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|a ионы аргона
|
| 610 |
1 |
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|a пленки
|
| 610 |
1 |
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|a оксид олова
|
| 610 |
1 |
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|a магнетронное осаждение
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| 610 |
1 |
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|a film of tin oxide
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| 610 |
1 |
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|a magnetron deposition
|
| 610 |
1 |
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|a ion beam
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| 700 |
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1 |
|a Umnov
|b S. P.
|c physicist
|c Senior researcher of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
|f 1957-
|g Sergey Pavlovich
|3 (RuTPU)RU\TPU\pers\34215
|
| 701 |
|
1 |
|a Asainov
|b O. Kh.
|c physicist
|c Head of the laboratory of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
|f 1957-
|g Oleg Khaydarovich
|3 (RuTPU)RU\TPU\pers\34632
|
| 701 |
|
1 |
|a Temenkov
|b V.
|g Vladimir
|
| 712 |
0 |
2 |
|a Томский политехнический университет
|c 1991-
|9 26305
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|a RU
|b 63413507
|c 20161230
|g RCR
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| 850 |
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|a 63413507
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|u http://earchive.tpu.ru/handle/11683/35841
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| 942 |
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|c BK
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