Analysis of work and increasing of efficiency of the ILUR-03 installation magnetron system for tubular specimens outer surface modification; Energy Fluxes and Radiation Effects (EFRE-2016)

Analysis of work and increasing of efficiency of the ILUR-03 installation magnetron system for tubular specimens outer surface modification; Energy Fluxes and Radiation Effects (EFRE-2016)

Bibliografske podrobnosti
Parent link:	Energy Fluxes and Radiation Effects (EFRE-2016).— 2016.— [P. 180]
Korporativna značnica:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра экспериментальной физики (ЭФ)
Drugi avtorji:	Volkov N. Nikolay, Yashin A. Alexander, Kalin B. Boris, Valikov R. Roman, Krivobokov V. P. Valery Pavlovich, Yanin S. N. Sergey Nikolaevich, Yuriev Yu. N. Yuri Nikolaevich
Izvleček:	Title screen
Jezik:	angleščina
Izdano:	2016
Teme:	труды учёных ТПУ электронный ресурс магнетроны трубчатые образцы модификация поверхности пучки ионы распыление тонкие пленки ion beam magnetron sputtering thin films modification
Online dostop:	http://earchive.tpu.ru/handle/11683/35828
Format:	Elektronski Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=621300

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