Analysis of work and increasing of efficiency of the ILUR-03 installation magnetron system for tubular specimens outer surface modification

Analysis of work and increasing of efficiency of the ILUR-03 installation magnetron system for tubular specimens outer surface modification

Bibliographische Detailangaben
Parent link:	Energy Fluxes and Radiation Effects (EFRE-2016): International Congress, October 2–7, 2016, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]. [P. 180].— , 2016
Körperschaft:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра экспериментальной физики (ЭФ)
Weitere Verfasser:	Volkov N. Nikolay, Yashin A. Alexander, Kalin B. Boris, Valikov R. Roman, Krivobokov V. P. Valery Pavlovich, Yanin S. N. Sergey Nikolaevich, Yuriev Yu. N. Yuri Nikolaevich
Zusammenfassung:	Title screen
Sprache:	Englisch
Veröffentlicht:	2016
Schlagworte:	труды учёных ТПУ электронный ресурс магнетроны трубчатые образцы модификация поверхности пучки ионы распыление тонкие пленки ion beam magnetron sputtering thin films modification
Online-Zugang:	http://earchive.tpu.ru/handle/11683/35828
Format:	Elektronisch Buchkapitel
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=621300

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