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20250904151030.0 |
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|a (RuTPU)RU\TPU\conf\19867
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| 035 |
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|a RU\TPU\conf\19857
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|a 621300
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|a 20161213d2016 k y0engy50 ba
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|a eng
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|a RU
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| 105 |
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|a y z 101zy
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| 135 |
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|a drgn ---uucaa
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| 181 |
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|a i
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| 182 |
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0 |
|a b
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| 200 |
1 |
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|a Analysis of work and increasing of efficiency of the ILUR-03 installation magnetron system for tubular specimens outer surface modification
|f N. Volkov [et al.]
|
| 203 |
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|a Текст
|c электронный
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| 300 |
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|a Title screen
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| 463 |
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0 |
|0 (RuTPU)RU\TPU\conf\19513
|t Energy Fluxes and Radiation Effects (EFRE-2016)
|o International Congress, October 2–7, 2016, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]
|v [P. 180]
|d 2016
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 610 |
1 |
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|a электронный ресурс
|
| 610 |
1 |
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|a магнетроны
|
| 610 |
1 |
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|a трубчатые образцы
|
| 610 |
1 |
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|a модификация
|
| 610 |
1 |
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|a поверхности
|
| 610 |
1 |
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|a пучки
|
| 610 |
1 |
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|a ионы
|
| 610 |
1 |
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|a распыление
|
| 610 |
1 |
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|a тонкие пленки
|
| 610 |
1 |
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|a ion beam
|
| 610 |
1 |
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|a magnetron
|
| 610 |
1 |
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|a sputtering
|
| 610 |
1 |
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|a thin films
|
| 610 |
1 |
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|a modification
|
| 701 |
|
1 |
|a Volkov
|b N.
|g Nikolay
|
| 701 |
|
1 |
|a Yashin
|b A.
|g Alexander
|
| 701 |
|
1 |
|a Kalin
|b B.
|g Boris
|
| 701 |
|
1 |
|a Valikov
|b R.
|g Roman
|
| 701 |
|
1 |
|a Krivobokov
|b V. P.
|c Russian physicist
|c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc)
|f 1948-
|g Valery Pavlovich
|3 (RuTPU)RU\TPU\pers\30416
|9 14757
|
| 701 |
|
1 |
|a Yanin
|b S. N.
|c physicist
|c Professor of Tomsk Polytechnic University, doctor of physical and mathematical Sciences
|f 1958-
|g Sergey Nikolaevich
|3 (RuTPU)RU\TPU\pers\35099
|9 18374
|
| 701 |
|
1 |
|a Yuriev
|b Yu. N.
|c specialist in the field of hydrogen energy
|c Head of the laboratory of Tomsk Polytechnic University, Associate Scientist
|f 1984-
|g Yuri Nikolaevich
|3 (RuTPU)RU\TPU\pers\31508
|9 15669
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Кафедра экспериментальной физики (ЭФ)
|3 (RuTPU)RU\TPU\col\21255
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| 801 |
|
2 |
|a RU
|b 63413507
|c 20161230
|g RCR
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| 856 |
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|u http://earchive.tpu.ru/handle/11683/35828
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| 942 |
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|c BK
|
