|
|
|
|
| LEADER |
00000naa2a2200000 4500 |
| 001 |
618966 |
| 005 |
20260716165900.0 |
| 035 |
|
|
|a (RuTPU)RU\TPU\conf\17359
|
| 090 |
|
|
|a 618966
|
| 100 |
|
|
|a 20160622d2016 k y0engy50 ba
|
| 101 |
0 |
|
|a eng
|
| 102 |
|
|
|a RU
|
| 135 |
|
|
|a drnn ---uucaa
|
| 181 |
|
0 |
|a i
|
| 182 |
|
0 |
|a b
|
| 200 |
1 |
|
|a Medical nanofilms of titanium oxynitride deposited by reactive magnetron sputtering
|f E. L. Boytsova, L. A. Leonova
|
| 203 |
|
|
|a Текст
|c электронный
|
| 300 |
|
|
|a Title screen.
|
| 463 |
|
1 |
|0 (RuTPU)RU\TPU\conf\17357
|t Nanoparticles, nanostructured coatings and microcontainers: technology, properties, applications
|o 7th International Conference, May 12-15, 2016, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU)
|v [P. 54]
|d 2016
|
| 610 |
1 |
|
|a электронный ресурс
|
| 610 |
1 |
|
|a труды учёных ТПУ
|
| 610 |
1 |
|
|a нанопленки
|
| 610 |
1 |
|
|a оксинитрид титана
|
| 610 |
1 |
|
|a магнетронное распыление
|
| 700 |
|
1 |
|a Boytsova
|b E. L.
|c physicist
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1975-
|g Elena Lvovna
|3 (RuTPU)RU\TPU\pers\36962
|9 19981
|
| 701 |
|
1 |
|a Leonova
|b L. A.
|c Chemical Engineer
|c Associate Professor of Tomsk Polytechnic University, Candidate of technical science
|f 1983-
|g Liliya Aleksandrovna
|3 (RuTPU)RU\TPU\pers\31564
|9 15724
|
| 712 |
0 |
2 |
|a Томский политехнический университет
|c 1991-
|9 26305
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20201109
|g RCR
|
| 856 |
4 |
|
|u http://www.lib.tpu.ru/fulltext/c/2016/001.pdf
|
| 942 |
|
|
|c BK
|
