Накопление микрочастиц вакуумной дуги на потенциальной мишени при короткоимпульсном высокочастотном потенциале смещения
| Parent link: | Перспективы развития фундаментальных наук.— 2013.— [С. 47-49] |
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| Main Author: | |
| Corporate Author: | |
| Other Authors: | , |
| Summary: | Заглавие с экрана The experimental results of the research of decreasing the macroparticles density on a substrate immersed in the vacuum-arc metal plasma with a high-frequency short-pulse negative bias potential are submitted. It was found out that the macroparticles density on the sample surface is determined by the bias potential amplitude, pulse duration and the processing time. |
| Language: | Russian |
| Published: |
2013
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| Series: | Физика |
| Subjects: | |
| Online Access: | http://www.lib.tpu.ru/fulltext/c/2013/C21/010.pdf |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=603530 |
| Physical Description: | 1 файл(346 Кб) |
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| Summary: | Заглавие с экрана The experimental results of the research of decreasing the macroparticles density on a substrate immersed in the vacuum-arc metal plasma with a high-frequency short-pulse negative bias potential are submitted. It was found out that the macroparticles density on the sample surface is determined by the bias potential amplitude, pulse duration and the processing time. |