Arc plasma-assisted deposition of nanocrystalline coatings; 25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)

Arc plasma-assisted deposition of nanocrystalline coatings; 25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)

Bibliographic Details
Parent link:	25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV).— 2012.— P. 537-540
Other Authors:	Krysina O. V., Koval N. N. Nikolay Nikolaevich, Ivanov Yu. F. Yuriy Fedorovich, Shugurov V. V.
Summary:	The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated. В фонде НТБ ТПУ отсутствует
Language:	English
Published:	2012
Subjects:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=602568

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