Arc plasma-assisted deposition of nanocrystalline coatings; 25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)
| Parent link: | 25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV).— 2012.— P. 537-540 |
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| Outros autores: | , , , |
| Summary: | The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated. В фонде НТБ ТПУ отсутствует |
| Idioma: | inglés |
| Publicado: |
2012
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| Subjects: | |
| Formato: | Capítulo de libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=602568 |
| Summary: | The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated. В фонде НТБ ТПУ отсутствует |
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