Hollow-cathode hot filament arc
| Parent link: | Proceedings of the 17th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Berkeley, CA, july 21-26, 1996.— , 1996 Vol. 2.— 1996.— P. 884-886 |
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| Autor principal: | |
| Altres autors: | , |
| Sumari: | A discharge system with a hot filament mounted inside a cylindrical hollow cathode designed to produce a low-pressure arc discharge is described together with the discharge characteristics. The combination of a hot filament and a hollow cathode allows a decrease in discharge operating voltage and a 3-4-fold increase in discharge current as compared to a configuration containing only a hot filament, without formation of a cathode spot. A discharge in argon with the pressure 1.5?10-1 Pa, the operating voltage 54 V, and the discharge current 90 A, produced plasma whose density in the central region of the working space (0.25 m3) was 1010 cm -3 with the plasma density distribution being uniform within ±20% of the average density. At a reduced pressure (~10-2 Pa), under the conditions of hindered discharge operation, the floating potential in the plasma acquires values 20-30 V below that of the cathode. A plasma generator based on the above type of discharge was used for finishing the material surface before and during the process of plasma-assisted deposition of coatings. В фонде НТБ ТПУ отсутствует |
| Idioma: | anglès |
| Publicat: |
1996
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| Matèries: | |
| Format: | Capítol de llibre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=602549 |
MARC
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| 101 | 0 | |a eng | |
| 102 | |a US | ||
| 200 | 1 | |a Hollow-cathode hot filament arc |f D. P. Borisov, N. N. Koval, P. M. Schanin | |
| 330 | |a A discharge system with a hot filament mounted inside a cylindrical hollow cathode designed to produce a low-pressure arc discharge is described together with the discharge characteristics. The combination of a hot filament and a hollow cathode allows a decrease in discharge operating voltage and a 3-4-fold increase in discharge current as compared to a configuration containing only a hot filament, without formation of a cathode spot. A discharge in argon with the pressure 1.5?10-1 Pa, the operating voltage 54 V, and the discharge current 90 A, produced plasma whose density in the central region of the working space (0.25 m3) was 1010 cm -3 with the plasma density distribution being uniform within ±20% of the average density. At a reduced pressure (~10-2 Pa), under the conditions of hindered discharge operation, the floating potential in the plasma acquires values 20-30 V below that of the cathode. A plasma generator based on the above type of discharge was used for finishing the material surface before and during the process of plasma-assisted deposition of coatings. | ||
| 333 | |a В фонде НТБ ТПУ отсутствует | ||
| 461 | |t Proceedings of the 17th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Berkeley, CA, july 21-26, 1996 |d 1996 | ||
| 463 | |t Vol. 2 |v P. 884-886 |d 1996 | ||
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a катод | |
| 610 | 1 | |a дуговая нить | |
| 700 | 1 | |a Borisov |b D. P. | |
| 701 | 1 | |a Koval |b N. N. |c specialist in the field of electronics |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1948- |g Nikolay Nikolaevich |3 (RuTPU)RU\TPU\pers\34748 | |
| 701 | 1 | |a Schanin |b P. M. | |
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| 801 | 2 | |a RU |b 63413507 |c 20160623 |g RCR | |
| 942 | |c BK | ||