Borisov D. P., Koval N. N. Nikolay Nikolaevich, Kovsharov N. F., Tolkachev V. S., & Schanin P. M. (1996). Vacuum arc deposition of TIN and TIOx films on large metallic and dielectric surfaces; Proceedings of the 17th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Berkeley, CA, july 21-26, 1996; Vol. 2. 1996.
Chicago Style (17th ed.) CitationBorisov D. P., Koval N. N. Nikolay Nikolaevich, Kovsharov N. F., Tolkachev V. S., and Schanin P. M. Vacuum Arc Deposition of TIN and TIOx Films on Large Metallic and Dielectric Surfaces; Proceedings of the 17th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Berkeley, CA, July 21-26, 1996; Vol. 2. 1996, 1996.
MLA (9th ed.) CitationBorisov D. P., et al. Vacuum Arc Deposition of TIN and TIOx Films on Large Metallic and Dielectric Surfaces; Proceedings of the 17th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Berkeley, CA, July 21-26, 1996; Vol. 2. 1996, 1996.