Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials; Proceedings of the 15th International Conference on High-Power Particle Beams(BEAMS 2004), Saint-Petersburg, July 18-23, 2004

Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials; Proceedings of the 15th International Conference on High-Power Particle Beams(BEAMS 2004), Saint-Petersburg, July 18-23, 2004

Bibliographic Details
Parent link:Proceedings of the 15th International Conference on High-Power Particle Beams(BEAMS 2004), Saint-Petersburg, July 18-23, 2004.— 2005.— P. 622-625
Other Authors: Ryabchikov A. I. Aleksandr Ilyich, Matvienko V. M., Petrov A. V., Struts V. K., Usov Y. P. Yuri Petrovich, Shlapakovski A. S.
Summary:The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.
В фонде НТБ ТПУ отсутствует
Language:English
Published: 2005
Subjects:
труды учёных ТПУ
Format: Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=599658

Similar Items

Similar Items