Metal vapor vacuum arc ion sources ''Raduga''; Review of Scientific Instruments; Vol. 65, Iss. 10
| Parent link: | Review of Scientific Instruments Vol. 65, Iss. 10.— 1994.— P. 3126-3133 |
|---|---|
| المؤلف الرئيسي: | Ryabchikov A. I. Aleksandr Ilyich |
| مؤلفون آخرون: | Dektjarev S. V., Stepanov I. B. |
| الملخص: | A brief review is presented of the ‘‘Raduga’’ 1–4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single‐ and multi‐element implantation. These advantages are achieved by using not only pure single‐element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described. |
| اللغة: | الإنجليزية |
| منشور في: |
1994
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| الموضوعات: | |
| التنسيق: | فصل الكتاب |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=599631 |
مواد مشابهة
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مواد مشابهة
-
Vacuum arc ion and plasma source Raduga-5. Technological applications; Korus 2001; Vol. 1
منشور في: (2001) -
High-current vacuum-arc ion and plasma source "Raduga-5" application to intermetallic phase formation; Review of Scientific Instruments; Vol. 77, Iss. 3
منشور في: (2006) -
Pulsed vacuum arc plasma source of supersonic metal ion flow; Review of Scientific Instruments; Vol. 91, iss. 2
منشور في: (2020) -
Generation of boron ion beams by vacuum arc and planar magnetron ion sources; Review of Scientific Instruments; Vol. 90, iss. 10
منشور في: (2019) -
Coating deposition using vacuum arc and ablation metal plasma; Surface and Coatings Technology; Vol. 203, № 17-18
حسب: Ryabchikov A. I. Aleksandr Ilyich
منشور في: (2009)