Развитие методов импульсно-периодической ионной имплантации и нанесения покрытий на основе вакуумной дуги в НИИ ЯФ при ТПУ; 6th International Conference on Modification of Materials with Particle Beams and Plasma Flows: 23-28 September, 2002, Tomsk, Russia
| Parent link: | 6th International Conference on Modification of Materials with Particle Beams and Plasma Flows: 23-28 September, 2002, Tomsk, Russia.— 2002.— С. 221-227 |
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| Glavni autor: | |
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| Sažetak: | Рез. англ. The analysis of the present state-of-the-art and development trends of the new methods being developed in the NPI at TPU for pulsed and dc vacuum arc-based ion and plasma materials processing are presented. The regularities and advantages are demonstrated for the method of repetitively-pulsed multi-element implantation with changing an ion beam composition from pulse to pulse or periodically, method of high-concentration implantation with compensation of surface ion sputtering by plasma deposition, method of metallic plasma deposition under repetitively-pulsed ion mixing with ion beams and plasma flow formed in the "Raduga-5" source, and method of metal plasma-immersion implantation from including short-pulse rf implantation using repetitively-pulsed and dc vacuum arc В фонде НТБ ТПУ отсутствует |
| Jezik: | ruski |
| Izdano: |
2002
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| Teme: | |
| Format: | Poglavlje knjige |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=599338 |
MARC
| LEADER | 00000naa0a2200000 4500 | ||
|---|---|---|---|
| 001 | 599338 | ||
| 005 | 20250417140426.0 | ||
| 035 | |a (RuTPU)RU\TPU\tpu\23355 | ||
| 035 | |a RU\TPU\tpu\23354 | ||
| 090 | |a 599338 | ||
| 100 | |a 20130617d2002 k||y0rusy50 ca | ||
| 101 | 0 | |a rus | |
| 102 | |a RU | ||
| 200 | 1 | |a Развитие методов импульсно-периодической ионной имплантации и нанесения покрытий на основе вакуумной дуги в НИИ ЯФ при ТПУ |f А. И. Рябчиков, И. Б. Степанов | |
| 300 | |a Рез. англ. | ||
| 330 | |a The analysis of the present state-of-the-art and development trends of the new methods being developed in the NPI at TPU for pulsed and dc vacuum arc-based ion and plasma materials processing are presented. The regularities and advantages are demonstrated for the method of repetitively-pulsed multi-element implantation with changing an ion beam composition from pulse to pulse or periodically, method of high-concentration implantation with compensation of surface ion sputtering by plasma deposition, method of metallic plasma deposition under repetitively-pulsed ion mixing with ion beams and plasma flow formed in the "Raduga-5" source, and method of metal plasma-immersion implantation from including short-pulse rf implantation using repetitively-pulsed and dc vacuum arc | ||
| 333 | |a В фонде НТБ ТПУ отсутствует | ||
| 463 | |t 6th International Conference on Modification of Materials with Particle Beams and Plasma Flows: 23-28 September, 2002, Tomsk, Russia |o proceedings |v С. 221-227 |d 2002 | ||
| 610 | 1 | |a труды учёных ТПУ | |
| 700 | 1 | |a Рябчиков |b А. И. |c физик |c профессор Томского политехнического университета, доктор физико-математических наук |f 1950- |g Александр Ильич |3 (RuTPU)RU\TPU\pers\22006 | |
| 701 | 1 | |a Степанов |b И. Б. |c физик |c заведующий лабораторией Центра исследования свойств материалов Томского политехнического университета, доктор технических наук |f 1968- |g Игорь Борисович |3 (RuTPU)RU\TPU\pers\26466 | |
| 801 | 1 | |a RU |b 63413507 |c 20110714 | |
| 801 | 2 | |a RU |b 63413507 |c 20130617 |g RCR | |
| 850 | |a 63413507 | ||
| 942 | |c BK | ||