APA (7th ed.) Citation

Ryabchikov A. I. Aleksandr Ilyich, Ryabchikov I. A., Stepanov I. B., & Usov Y. P. Yuri Petrovich. (2005). High-Frequency Short-Pulsed Metal Plasma-Immersion Ion Implantation Using Filtered DC Vacuum-Arc Plasma; 8th International Workshop on Plasma-Based Ion Implantation and Deposition (China, September 18-22, 2005). 2005.

Chicago Style (17th ed.) Citation

Ryabchikov A. I. Aleksandr Ilyich, Ryabchikov I. A., Stepanov I. B., and Usov Y. P. Yuri Petrovich. High-Frequency Short-Pulsed Metal Plasma-Immersion Ion Implantation Using Filtered DC Vacuum-Arc Plasma; 8th International Workshop on Plasma-Based Ion Implantation and Deposition (China, September 18-22, 2005). 2005, 2005.

MLA (9th ed.) Citation

Ryabchikov A. I. Aleksandr Ilyich, et al. High-Frequency Short-Pulsed Metal Plasma-Immersion Ion Implantation Using Filtered DC Vacuum-Arc Plasma; 8th International Workshop on Plasma-Based Ion Implantation and Deposition (China, September 18-22, 2005). 2005, 2005.