Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams
| Parent link: | Proceedings of the 15th International Conference on High-Power Particle Beams (BEAMS 2004), Saint-Petersburg, July 18-23, 2004.— 2005.— P. 643-646 |
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| Other Authors: | , , , , |
| Summary: | The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared. В фонде НТБ ТПУ отсутствует |
| Language: | English |
| Published: |
2005
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| Subjects: | |
| Format: | Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=596760 |
| Summary: | The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared. В фонде НТБ ТПУ отсутствует |
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