Properties of Ti coatings deposited by high-power ion beams

Properties of Ti coatings deposited by high-power ion beams

Bibliographic Details
Parent link:	Inorganic Materials: Applied Research Vol. 3, № 3.— 2012.— P. 220-225
Other Authors:	Struts V. K., Matvienko V. M., Petrov A. V., Ryabchikov A. I. Aleksandr Ilyich
Summary:	Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young's modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin-film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion. В фонде НТБ ТПУ отсутствует
Published:	2012
Subjects:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=596381

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