Properties of Ti coatings deposited by high-power ion beams

Detaylı Bibliyografya
Parent link:Inorganic Materials: Applied Research
Vol. 3, № 3.— 2012.— P. 220-225
Diğer Yazarlar: Struts V. K., Matvienko V. M., Petrov A. V., Ryabchikov A. I. Aleksandr Ilyich
Özet:Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young's modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin-film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion.
В фонде НТБ ТПУ отсутствует
Baskı/Yayın Bilgisi: 2012
Konular:
Materyal Türü: Kitap Bölümü
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=596381

MARC

LEADER 00000naa0a2200000 4500
001 596381
005 20250407142024.0
035 |a (RuTPU)RU\TPU\tpu\19148 
090 |a 596381 
100 |a 20110117d2012 k||y0rusy50 ba 
101 0 |a eng 
102 |a US 
200 1 |a Properties of Ti coatings deposited by high-power ion beams  |f V. K. Struts [et al.] 
330 |a Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young's modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin-film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion. 
333 |a В фонде НТБ ТПУ отсутствует 
461 |t Inorganic Materials: Applied Research 
463 |t Vol. 3, № 3  |v P. 220-225  |d 2012 
610 1 |a труды учёных ТПУ 
701 1 |a Struts  |b V. K. 
701 1 |a Matvienko  |b V. M. 
701 1 |a Petrov  |b A. V. 
701 1 |a Ryabchikov  |b A. I.  |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences  |c physicist  |f 1950-  |g Aleksandr Ilyich  |3 (RuTPU)RU\TPU\pers\30912 
801 1 |a RU  |b 63413507  |c 20110117 
801 2 |a RU  |b 63413507  |c 20131011  |g RCR 
942 |c CR