Проблемы микроэлектронной технологии: Сборник статей
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| Language: | Russian |
| Published: |
Москва, Наука, 1994
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| Series: | Труды ФТИАН Т. 7 |
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| Format: | Book |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=58292 |
| Physical Description: | 75 с. ил. |
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| ISBN: | 502007019X |