APA (7th ed.) Citation

Abrahamyan A. S., Mkrtchyan A. H., Nalbandyan V. V., Hovhannisyan N. T., Chilingaryan R. Yu., Hakobyan A. S., & Mossoyan P. H. (2018). Cleaning and sputtering using planar acoustoplasma magnetron; Resource-Efficient Technologies; No 3. 2018. https://doi.org/10.18799/24056537/2018/3/197

Chicago Style (17th ed.) Citation

Abrahamyan A. S., Mkrtchyan A. H., Nalbandyan V. V., Hovhannisyan N. T., Chilingaryan R. Yu., Hakobyan A. S., and Mossoyan P. H. Cleaning and Sputtering Using Planar Acoustoplasma Magnetron; Resource-Efficient Technologies; No 3. 2018, 2018. https://doi.org/10.18799/24056537/2018/3/197.

MLA (9th ed.) Citation

Abrahamyan A. S., et al. Cleaning and Sputtering Using Planar Acoustoplasma Magnetron; Resource-Efficient Technologies; No 3. 2018, 2018. https://doi.org/10.18799/24056537/2018/3/197.