Технология обработки поверхностей в микроэлектронике
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| Language: | Russian |
| Published: |
Киев, Тэхника, 1990
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| Format: | Book |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=374009 |
| Physical Description: | 207 с. ил. |
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| ISBN: | 5335005726 |