APA (7th ed.) Citation

Ryabchikov A. I. Aleksandr Ilyich, Stepanov I. B. Igor Borisovich, Sivin D. O. Denis Olegovich, Dektyarev S. V. Sergey Valentinovich, & Dodorin K. Yu. (2012). High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma. 2012.

Chicago Style (17th ed.) Citation

Ryabchikov A. I. Aleksandr Ilyich, Stepanov I. B. Igor Borisovich, Sivin D. O. Denis Olegovich, Dektyarev S. V. Sergey Valentinovich, and Dodorin K. Yu. High-frequency Short-pulsed Metal Plasma-immersion Ion Implantation Using Filtered DC Vacuum-arc Plasma. 2012, 2012.

MLA (9th ed.) Citation

Ryabchikov A. I. Aleksandr Ilyich, et al. High-frequency Short-pulsed Metal Plasma-immersion Ion Implantation Using Filtered DC Vacuum-arc Plasma. 2012, 2012.