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| 001 |
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20231101233018.0 |
| 010 |
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|a 9781466509542
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| 035 |
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|a (RuTPU)RU\TPU\book\277780
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|a 255275
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| 100 |
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|a 20140327d2013 k y0engy50 ba
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| 101 |
0 |
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|a eng
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| 102 |
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|a US
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| 105 |
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|a a z 001zy
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| 200 |
1 |
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|a Microelectronics to Nanoelectronics: Materials, Devices & Manufacturability
|f edited by A. B. Kaul
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| 210 |
|
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|a New York
|c Taylor & Francis Group
|c CRC Press
|d 2013
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| 215 |
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|a 407 p.
|c il.
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| 320 |
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|a Index: p. 387-407.
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| 330 |
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|a Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices & Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena. Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of the California Institute of Technology's Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul's considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry. Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy's Sandia National Laboratory.
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| 606 |
1 |
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|a Микроэлектроника
|2 stltpush
|3 (RuTPU)RU\TPU\subj\43811
|9 63253
|
| 606 |
1 |
|
|a Наноэлектроника
|2 stltpush
|3 (RuTPU)RU\TPU\subj\58929
|9 76611
|
| 610 |
1 |
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|a микроэлектронные устройства
|
| 610 |
1 |
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|a материалы
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| 610 |
1 |
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|a производство
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| 610 |
1 |
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|a микроэлектромеханические системы
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| 610 |
1 |
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|a микроэлектронная технология
|
| 610 |
1 |
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|a английский язык
|
| 675 |
|
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|a 621.382.049.77
|v 3
|
| 675 |
|
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|a 621.382:53
|v 3
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| 702 |
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1 |
|a Kaul
|b A. B.
|g Anupama
|4 340
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| 801 |
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1 |
|a RU
|b 63413507
|c 20140327
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|a RU
|b 63413507
|c 20141211
|g RCR
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| 942 |
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|c BK
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| 959 |
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|a 44/20140311
|d 1
|e 0
|f ЧЗИЛ:1
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