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| LEADER |
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| 001 |
239746 |
| 005 |
20231031205523.0 |
| 035 |
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|a (RuTPU)RU\TPU\book\260971
|
| 035 |
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|a RU\TPU\book\260932
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| 090 |
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|a 239746
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| 100 |
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|a 20130613d2004 k y0rusy50 ca
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| 101 |
0 |
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|a rus
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| 102 |
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|a RU
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| 200 |
1 |
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|a Mechanical Properties of Titanium Films Deposited by Pulsed High-Power Ion Beams
|f V. K. Struts [et al.]
|
| 320 |
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|a References: p. 468 (10 tit.)
|
| 330 |
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|a The adhesion of a titanium film to a silicon substrate, film nanohardness, Youngmodulus, and other properties have been investigated depending on a distance from a sputtered target to substrate and a thickness of the deposited film. Films were deposited from the ablation plasma formed under a pulsed high-power ion beam impinging on the titanium target. The analysis of experimental data has shown that at a given film thickness, the adhesion strength increases with increasing target-substrate distance; this dependence is stronger for thinner films. Adhesion significantly reduces as the film thickness increases, and this dependence is stronger at larger targetsubstrate distances. The friction coefficient of a diamond Rockwell indenter moving along the film considerably decreases, whereas the film nanohardness and Young modulus at a given indentation load grow as the target-substrate distance increases
|
| 463 |
|
1 |
|0 (RuTPU)RU\TPU\book\95222
|y 5-94458-042-9
|t 7th International Conference on Modification of Materials with Particle Beams and Plasma Flows (Tomsk, Russia, 25-30 July 2004)
|o proceedings
|f Tomsk Polytechnic University (TPU) ; ed. S. Korovin, A. Ryabchikov
|v P. 465-468
|d 2004
|p 519 p.
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 701 |
|
1 |
|a Struts
|b V. K.
|
| 701 |
|
1 |
|a Matvienko
|b V. M.
|
| 701 |
|
1 |
|a Petrov
|b A. V.
|
| 701 |
|
1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Shlapakovski
|b A. S.
|
| 801 |
|
1 |
|a RU
|b 63413507
|c 20130613
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20130718
|g RCR
|
| 942 |
|
|
|c BK
|
