Ryabchikov A. I. Aleksandr Ilyich, Ryabchikov I. A., & Stepanov I. B. Igor Borisovich. (2004). High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma. (Part 2); 7th International Conference on Modification of Materials with Particle Beams and Plasma Flows (Tomsk, Russia, 25-30 July 2004). 2004.
Citação norma ChicagoRyabchikov A. I. Aleksandr Ilyich, Ryabchikov I. A., and Stepanov I. B. Igor Borisovich. High-frequency Short-pulsed Metal Plasma-immersion Ion Implantation Using Filtered DC Vacuum-arc Plasma. (Part 2); 7th International Conference on Modification of Materials with Particle Beams and Plasma Flows (Tomsk, Russia, 25-30 July 2004). 2004, 2004.
Citação norma MLARyabchikov A. I. Aleksandr Ilyich, et al. High-frequency Short-pulsed Metal Plasma-immersion Ion Implantation Using Filtered DC Vacuum-arc Plasma. (Part 2); 7th International Conference on Modification of Materials with Particle Beams and Plasma Flows (Tomsk, Russia, 25-30 July 2004). 2004, 2004.