Investigations of electrical resistivity of cu-films, produced by vacuum-arc evaporation on dielectric substrates

Dettagli Bibliografici
Parent link:10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010: proceedings/ Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov. P. 576-578.— , 2010.— 978-5-94458-112-9
Altri autori: Samoilenko (Samoylenko) G. M. Gennady Mikhailovich, Yushkov Y. G. Yuri Georgievich, Chumerin P.Yu., Ryabchikov A. I. Aleksandr Ilyich, Stepanov I. B. Igor Borisovich, Shulepov I. A. Ivan Anisimovich
Riassunto:The results of the preliminary investigations of physical-mechanical and impedance characteristicsof copper coverings on a dielectric substrates, received by a vacuum-arc evaporationmethod with short-pulse high-frequency potential of displacement are presented. Engineering andmodes of deposition, measurements of physicalmechanical properties and surface films impedancein a range of frequencies 1.5-9.4 GHz are described. Copper coverings by thickness 2-5 μm onquartz, glass and Teflon with surface resistance equal to surface resistance of a bulk copper in themicrowave range are received
Lingua:inglese
Pubblicazione: 2010
Soggetti:
Natura: Capitolo di libro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239676

MARC

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200 1 |a Investigations of electrical resistivity of cu-films, produced by vacuum-arc evaporation on dielectric substrates  |f G. M. Samoilenko (Samoylenko) [et al.] 
320 |a References: 5 tit. 
330 |a The results of the preliminary investigations of physical-mechanical and impedance characteristicsof copper coverings on a dielectric substrates, received by a vacuum-arc evaporationmethod with short-pulse high-frequency potential of displacement are presented. Engineering andmodes of deposition, measurements of physicalmechanical properties and surface films impedancein a range of frequencies 1.5-9.4 GHz are described. Copper coverings by thickness 2-5 μm onquartz, glass and Teflon with surface resistance equal to surface resistance of a bulk copper in themicrowave range are received 
463 1 |0 (RuTPU)RU\TPU\book\229499  |y 978-5-94458-112-9  |t 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010  |o proceedings  |f Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov  |v P. 576-578  |d 2010  |p 782 p. 
610 1 |a труды учёных ТПУ 
701 1 |a Samoilenko (Samoylenko)  |b G. M.  |c physicist  |c Senior Lecturer of Tomsk Polytechnic University, Candidate of technical sciences  |f 1945-  |g Gennady Mikhailovich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\31799 
701 1 |a Yushkov  |b Y. G.  |c Russian scientist  |c Professor of Tomsk Polytechnic University  |f 1937-  |g Yuri Georgievich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\25936 
701 1 |a Chumerin  |b P.Yu. 
701 1 |a Ryabchikov  |b A. I.  |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences  |c physicist  |f 1950-  |g Aleksandr Ilyich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\30912 
701 1 |a Stepanov  |b I. B.  |c physicist  |c Head of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences  |f 1968-  |g Igor Borisovich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\34218 
701 1 |a Shulepov  |b I. A.  |c physicist  |c Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences  |f 1954-  |g Ivan Anisimovich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\33092 
801 1 |a RU  |b 63413507  |c 20091014 
801 2 |a RU  |b 63413507  |c 20160701  |g RCR 
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