Investigation of microdefects transformation on the coatings surface during vacuum-arc plasma deposition

Investigation of microdefects transformation on the coatings surface during vacuum-arc plasma deposition

Bibliographic Details
Parent link:10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010: proceedings/ Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov. P. 209-212.— , 2010.— 978-5-94458-112-9
Main Author: Ryabchikov A. I. Aleksandr Ilyich
Other Authors: Shulepov I. A. Ivan Anisimovich, Sivin D. O. Denis Olegovich
Summary:The paper is devoted to investigation of a possibility of transformation of the vacuum-arc discharge microparticles on the surface of samples at the high-frequency short-pulse plasma-immersion implantation. A physical model of the selective heating, ion sputtering and microparticles evaporation is considered. A possibility of a complete elimination of microparticles from the surface of the coating being deposited or already deposited is experimentally shown on example of Ti microparticles
Published: 2010
Subjects:
труды учёных ТПУ
Format: Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239675

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