Investigation of microdefects transformation on the coatings surface during vacuum-arc plasma deposition; 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010

Investigation of microdefects transformation on the coatings surface during vacuum-arc plasma deposition; 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010

Bibliographic Details
Parent link:	10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010.— 2010.— P. 209-212
Main Author:	Ryabchikov A. I. Aleksandr Ilyich
Other Authors:	Shulepov I. A. Ivan Anisimovich, Sivin D. O. Denis Olegovich
Summary:	The paper is devoted to investigation of a possibility of transformation of the vacuum-arc discharge microparticles on the surface of samples at the high-frequency short-pulse plasma-immersion implantation. A physical model of the selective heating, ion sputtering and microparticles evaporation is considered. A possibility of a complete elimination of microparticles from the surface of the coating being deposited or already deposited is experimentally shown on example of Ti microparticles
Language:	English
Published:	2010
Subjects:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239675

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