Detalhes bibliográficos
| Parent link: | 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010.— 2010.— P. 209-212 |
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| Autor principal: |
Ryabchikov A. I. Aleksandr Ilyich |
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| Outros Autores: |
Shulepov I. A. Ivan Anisimovich,
Sivin D. O. Denis Olegovich |
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| Resumo: | The paper is devoted to investigation of a possibility of transformation of the vacuum-arc discharge microparticles on the surface of samples at the high-frequency short-pulse plasma-immersion implantation. A physical model of the selective heating, ion sputtering and microparticles evaporation is considered. A possibility of a complete elimination of microparticles from the surface of the coating being deposited or already deposited is experimentally shown on example of Ti microparticles |
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| Idioma: | inglês |
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| Publicado em: |
2010
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| Assuntos: | |
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| Formato: | Capítulo de Livro
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| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239675 |
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