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| LEADER |
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| 001 |
239675 |
| 005 |
20231031205516.0 |
| 035 |
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|a (RuTPU)RU\TPU\book\260900
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| 035 |
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|a RU\TPU\book\260690
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| 090 |
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|a 239675
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| 100 |
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|a 20130611d2010 k y0engy50 ba
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| 101 |
0 |
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|a eng
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| 102 |
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|a RU
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| 200 |
1 |
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|a Investigation of microdefects transformation on the coatings surface during vacuum-arc plasma deposition
|f A. I. Ryabchikov, I. A. Shulepov, D. O. Sivin
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| 320 |
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|a References: 6 tit.
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| 330 |
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|a The paper is devoted to investigation of a possibility of transformation of the vacuum-arc discharge microparticles on the surface of samples at the high-frequency short-pulse plasma-immersion implantation. A physical model of the selective heating, ion sputtering and microparticles evaporation is considered. A possibility of a complete elimination of microparticles from the surface of the coating being deposited or already deposited is experimentally shown on example of Ti microparticles
|
| 463 |
|
1 |
|0 (RuTPU)RU\TPU\book\229499
|y 978-5-94458-112-9
|t 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010
|o proceedings
|f Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov
|v P. 209-212
|d 2010
|p 782 p.
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 700 |
|
1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Shulepov
|b I. A.
|c physicist
|c Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
|f 1954-
|g Ivan Anisimovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\33092
|
| 701 |
|
1 |
|a Sivin
|b D. O.
|c physicist
|c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences
|f 1978-
|g Denis Olegovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\34240
|
| 801 |
|
1 |
|a RU
|b 63413507
|c 20091014
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20160630
|g RCR
|
| 942 |
|
|
|c BK
|
