Equipment and methods for hybrid technologies of ion beam and plasma surface materials modification; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008

Equipment and methods for hybrid technologies of ion beam and plasma surface materials modification; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008

Bibliografiske detaljer
Parent link:	9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008.— P. 91-94
Hovedforfatter:	Ryabchikov A. I. Aleksandr Ilyich
Andre forfattere:	Stepanov I. B. Igor Borisovich
Summary:	A new-generation installation for realization of hybrid technologies of the ion beam and plasma material treatment includes vacuum-arc generators of gaseous and metal plasma with the devices for micro-particles filtering, medium frequency dual magnetron, high current ion and plasma source, high voltage generator for high-frequency short-pulsed plasma-immersion ion implantation or coating deposition. With the use of the complex installation equipment an intermetallic Al → Ti system was formed in a target surface layer to a depth of 2600 nm with dopants concentration up to 60%. The abilities of improvement of the main physical and mechanical characteristics of coatings in comparison with conventional PVD technologies have been demonstrated on the example of formation of monolayer TiSiB coating and multilayer TiAlN/TiN coatings with the thickness of each separate layer varied from 2 to 10 nm.
Sprog:	engelsk
Udgivet:
Fag:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239582

Lignende værker

Coating deposition using vacuum arc and ablation metal plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008
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9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008: proceedings
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Equipment and methods for hybrid technologies of ion beam and plasma surface materials modification; Surface and Coatings Technology; Vol. 203, № 17-18
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Quasiribbon vacuum arc ion source "Raduga-6"; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008
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On evaporation smoothing mechanism of metal surface under the irradiation by submicrosecond ion beams; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008
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Deposition of biocompatible calcium-phosphate coatings by high power lon beam ablation plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008
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Investigation of Plasma Filter Influence on Ions Charge State of DC Vacuum Arc Plasma; 7 International conference on modification of materials with particle beams and plasma flows
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On Erosion Mechanisms of the Solid Surface under the Treatment with Submicrosecond Ion Beams; 7 International conference on modification of materials with particle beams and plasma flows
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Automatic installation for magnetron spattering deposition of nanostructured coatings with middle-frequency discharge of oil-free plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008
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Modification of Ferrite Ceramics Properties by Intensive Pulsed Beam of Low-Energy Electrons; 7 International conference on modification of materials with particle beams and plasma flows
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High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma. (Part 1); 7th International Conference on Modification of Materials with Particle Beams and Plasma Flows (Tomsk, Russia, 25-30 July 2004)
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High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma. (Part 2); 7th International Conference on Modification of Materials with Particle Beams and Plasma Flows (Tomsk, Russia, 25-30 July 2004)
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Phenomenological Model of Dc Magnetron Discharge; 7 International conference on modification of materials with particle beams and plasma flows
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Research of Protective Properties of Microplasma Coatings; 7 International conference on modification of materials with particle beams and plasma flows
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(Ti, Al)N and (Ti, Al)N/TiN multilayer coating deposition using filtered vacuum arc plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008
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