Automatic installation for magnetron spattering deposition of nanostructured coatings with middle-frequency discharge of oil-free plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008

Automatic installation for magnetron spattering deposition of nanostructured coatings with middle-frequency discharge of oil-free plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008

Bibliographic Details
Parent link:	9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008.— P. 35-37
Other Authors:	Kusmin O. S., Kositsin L. G., Padusenko A. N., Pokushalov A. V., Yermolovich I. M., Pichugin V. F. Vladimir Fyodorovich
Summary:	The laboratory installation of magnetron spattering deposition for producing nanostructuredcoatings has been developed. The installation provides oil-free high-vacuum pumping andautomatic creation of gaseous environment through three channels. The deposition of coatingsis carried out by a disk-shaped magnetron spattering system with an optimal configuration of magnetic field. The magnetron system produces an equal erosion of 200 mm cathode. An inverter source for discharge supply with the modulation of output voltage and assured nullification by frequency equal to 10-60 kHz was produced. The microcontrolled management of a source makes it possible to do the deposition of reactive coatings by using the regime of the current stabilization or power discharge without the diode breakdown. A vacuum chamber includes 20 kV source of ions for the cyclical maintainability of process deposition during substrate rotation. The installation is applied for the production of biocompatible oxidenitride coatings for medical implants
Language:	English
Published:
Subjects:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239475

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