APA (7th ed.) Citation

Kusmin O. S., Kositsin L. G., Padusenko A. N., Pokushalov A. V., Yermolovich I. M., & Pichugin V. F. Vladimir Fyodorovich. Automatic installation for magnetron spattering deposition of nanostructured coatings with middle-frequency discharge of oil-free plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008.

Chicago Style (17th ed.) Citation

Kusmin O. S., Kositsin L. G., Padusenko A. N., Pokushalov A. V., Yermolovich I. M., and Pichugin V. F. Vladimir Fyodorovich. Automatic Installation for Magnetron Spattering Deposition of Nanostructured Coatings with Middle-frequency Discharge of Oil-free Plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008.

MLA (9th ed.) Citation

Kusmin O. S., et al. Automatic Installation for Magnetron Spattering Deposition of Nanostructured Coatings with Middle-frequency Discharge of Oil-free Plasma; 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008.