(Ti, Al)N and (Ti, Al)N/TiN multilayer coating deposition using filtered vacuum arc plasma

(Ti, Al)N and (Ti, Al)N/TiN multilayer coating deposition using filtered vacuum arc plasma

Bibliographic Details
Parent link:Koval, N. N. (specialist in the field of electronics ; 1948-). 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008=[9 Международная конференция по модификации материалов пучками частиц и плазменными потоками, Томск, 21-26 сентября 2008 г.]: proceedings. P. 631-634.— .— Tomsk: Publishing house of the IAO SB RAS.— 9785944580900
Other Authors: Ryabchikov A. I. Aleksandr Ilyich, Stepanov I. B. Igor Borisovich, Geikin V. A., Nochovnaya N. A., Легостаев В. Н. Виктор Никифорович, Shulepov I. A. Ivan Anisimovich, Sivin D. O. Denis Olegovich, Eremin S. E.
Summary:The paper presents the research results on deposition of monolayer (Ti, Al)N and multilayer(Ti, Al)N/TiN coatings. The deposition technology presents a synthesis of principles of arc deposition with separation of microparticle fraction and plasmaimmersion ion implantation. An opportunity of obtaining thick nanostructure multilayer (Ti, Al)N/TiN coatings, which have better mechanical and exploitation properties than the monolayer coatings has been shown. The experimental results of the elemental composition investigation, various mechanical and exploitation properties (Ti, Al)N and multilayer (Ti, Al)N/TiN coatings have been presented
Published:
Subjects:
труды учёных ТПУ
Format: Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239442

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