|
|
|
|
| LEADER |
00000naa2a2200000 4500 |
| 001 |
239442 |
| 005 |
20240613161044.0 |
| 035 |
|
|
|a (RuTPU)RU\TPU\book\260661
|
| 035 |
|
|
|a RU\TPU\book\253610
|
| 090 |
|
|
|a 239442
|
| 100 |
|
|
|a 20130607d2008 k y0engy50 ba
|
| 101 |
0 |
|
|a eng
|
| 102 |
|
|
|a RU
|
| 200 |
1 |
|
|a (Ti, Al)N and (Ti, Al)N/TiN multilayer coating deposition using filtered vacuum arc plasma
|f A. I. Ryabchikov [et al.]
|
| 320 |
|
|
|a References: 8 tit.
|
| 330 |
|
|
|a The paper presents the research results on deposition of monolayer (Ti, Al)N and multilayer(Ti, Al)N/TiN coatings. The deposition technology presents a synthesis of principles of arc deposition with separation of microparticle fraction and plasmaimmersion ion implantation. An opportunity of obtaining thick nanostructure multilayer (Ti, Al)N/TiN coatings, which have better mechanical and exploitation properties than the monolayer coatings has been shown. The experimental results of the elemental composition investigation, various mechanical and exploitation properties (Ti, Al)N and multilayer (Ti, Al)N/TiN coatings have been presented
|
| 463 |
|
1 |
|0 144986
|t 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 2008
|9 th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 21-21September 20082008
|p 733 p.
|9 144986
|a Koval, N. N. (specialist in the field of electronics ; 1948-)
|c Tomsk
|l [9 Международная конференция по модификации материалов пучками частиц и плазменными потоками, Томск, 21-26 сентября 2008 г.]
|n Publishing house of the IAO SB RAS
|o proceedings
|v P. 631-634
|y 9785944580900
|
| 610 |
1 |
|
|a труды учёных ТПУ
|
| 701 |
|
1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Stepanov
|b I. B.
|c physicist
|c Head of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences
|f 1968-
|g Igor Borisovich
|3 (RuTPU)RU\TPU\pers\34218
|
| 701 |
|
1 |
|a Geikin
|b V. A.
|
| 701 |
|
1 |
|a Nochovnaya
|b N. A.
|
| 701 |
|
1 |
|a Легостаев
|b В. Н.
|c российский физик
|c старший научный сотрудник Томского политехнического университета, кандидат технических наук
|f 1947-
|g Виктор Никифорович
|3 (RuTPU)RU\TPU\pers\30671
|
| 701 |
|
1 |
|a Shulepov
|b I. A.
|c physicist
|c Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
|f 1954-
|g Ivan Anisimovich
|3 (RuTPU)RU\TPU\pers\33092
|
| 701 |
|
1 |
|a Sivin
|b D. O.
|c physicist
|c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences
|f 1978-
|g Denis Olegovich
|3 (RuTPU)RU\TPU\pers\34240
|
| 701 |
|
1 |
|a Eremin
|b S. E.
|
| 801 |
|
1 |
|a RU
|b 63413507
|c 20091014
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20160630
|g RCR
|
| 942 |
|
|
|c BK
|
