PVD of coatings based on plasma filter application

מידע ביבליוגרפי
Parent link:Korus 2001: The 5th Korea-Russia International Symposium on Science and Technology, June 26 - July 3, 2001, Tomsk/ Tomsk Polytechnic University (TPU) ; KORUS.— , 2001-
Vol. 1.— 2001.— P. 383-386
מחבר ראשי: Ryabchikov A. I. Aleksandr Ilyich
מחברים אחרים: Stepanov I. B. Igor Borisovich, Shulepov I. A. Ivan Anisimovich
סיכום:The paper presents the results of investigating the formation of vacuum-arc plasma flow cleaned from the microparticle fraction. The plasma filter design is based on plasma spread in a channel formed by electrodes located at an angle with the axis of an arc evaporator. The effects of magnetic insulation of the electrodes and the positive near-electrode potential drop on the mechanisms of charged plasma component spread are investigated. The results of the obtained experimental data are discussed
שפה:אנגלית
יצא לאור: 2001
נושאים:
פורמט: Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239354

MARC

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200 1 |a PVD of coatings based on plasma filter application  |f A. I. Ryabchikov, I. B. Stepanov, I. A. Shulepov 
320 |a References: p. 386 (7 tit.) 
330 |a The paper presents the results of investigating the formation of vacuum-arc plasma flow cleaned from the microparticle fraction. The plasma filter design is based on plasma spread in a channel formed by electrodes located at an angle with the axis of an arc evaporator. The effects of magnetic insulation of the electrodes and the positive near-electrode potential drop on the mechanisms of charged plasma component spread are investigated. The results of the obtained experimental data are discussed 
461 0 |0 (RuTPU)RU\TPU\book\39044  |t Korus 2001  |o The 5th Korea-Russia International Symposium on Science and Technology, June 26 - July 3, 2001, Tomsk  |o proceedings  |f Tomsk Polytechnic University (TPU) ; KORUS  |d 2001- 
463 0 |0 (RuTPU)RU\TPU\book\31152  |t Vol. 1  |v P. 383-386  |d 2001  |p 392 p. 
610 1 |a труды учёных ТПУ 
700 1 |a Ryabchikov  |b A. I.  |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences  |c physicist  |f 1950-  |g Aleksandr Ilyich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\30912 
701 1 |a Stepanov  |b I. B.  |c physicist  |c Head of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences  |f 1968-  |g Igor Borisovich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\34218 
701 1 |a Shulepov  |b I. A.  |c physicist  |c Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences  |f 1954-  |g Ivan Anisimovich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\33092 
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801 2 |a RU  |b 63413507  |c 20160701  |g RCR 
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