Study of tungsten disulfide thin films produces by magnetron spattering of nanostructured targets; Перспективы развития фундаментальных наук

Study of tungsten disulfide thin films produces by magnetron spattering of nanostructured targets; Перспективы развития фундаментальных наук

Bibliographic Details
Parent link:	Перспективы развития фундаментальных наук.— 2012.— [С. 30-31]
Main Author:	Bozheyev F. E.
Other Authors:	Irtegov Y. A. (научный руководитель), Dronova M. V., Pogrebenkov V. M.
Summary:	Заглавие с экрана В работе представлены результаты исследования тонких плёнок дисульфида вольфрама, полученных магнетронным распылением наноструктурных мишеней в атмосфере аргона. Мишени для магнетронного распыления получали путем компактирования нанослоистого порошка дисульфида вольфрама приготовленного методом СВС. Тонкие плёнки напылялись на стеклянные, металлические и стеклянные подложки при различных мощностях и времени напыления. В работе исследуются оптические свойства, морфология и рентгенофазовый состав тонких пленок дисульфида вольфрама.
Language:	English
Published:	2012
Series:	Физика
Subjects:	электронный ресурс труды учёных ТПУ исследование тонкие пленки дисульфид вольфрама магнетронное распыление наноструктурные состояния
Online Access:	http://www.lib.tpu.ru/fulltext/c/2012/C21/005.pdf
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=236152

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